To ensure thremal balance, RIB location is designed by finite element analysis (FEA)assuring and optimized rigid structure.
Precision is achieved through Extended distance between linear guide ways; Cryogenic treatment of C1 class ball screw; Supported by two sides and a high resolution AC servomotor. Theses outstanding features boost accuracy in micro step amounts up to 1 µm.
Laser calibration, pitch error compensation.
Closed loop linear scale (Option).
A rugged case iron machine structure is the foundation of precision.